Statistical Analysis of the Deposition Parameters of Multilayer AgO/Ag–TaO/TaO Thin Films on an SS316L Substrate
DOI:
https://doi.org/10.22153/kej.2026.05.003Keywords:
Multilayer coating; deposition parameters; surface modification technology; adhesion strengthAbstract
Surgical instruments designed for high performance require coatings with strong mechanical properties, water-repellent features and compatibility with biological tissues to minimise interactions with bodily fluids during surgery. In this study, the structural and surface characteristics of multilayer AgO/Ag–TaO/TaO thin films deposited on a stainless steel 316L (SS316L) substrate by physical vapor deposition magnetron sputtering were investigated as functions of various deposition parameters. The effect of AgO deposition time and radiofrequency (RF) sputtering power was studied by using a central composite design with response surface methodology. Results demonstrate a significant correlation between the predicted and actual values of adhesion strength (R2 = 0.9105), confirming the adequacy of the model. Adhesion strength was significantly affected by RF sputtering power then by deposition time. Wettability was also influenced by these parameters. Interaction plots show enhanced wettability at certain RF power levels, with a maximum contact angle of 89.6°. The optimal adhesion strength was obtained under specific RF power and deposition time conditions, with a maximum scratch distance of 705 mN. This work provides useful insights into the role of deposition parameters in tailoring the performance of thin films for biomedical and industrial applications.
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